한국어
LIBRARY
Communities & Collections
Researchers
Articles
Issue Date
Journals
검색
Search
All of ScholarWorks
Science
Department of Biological Science
Department of Chemistry
Department of Mathematics
Department of Physics
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-1 of 1 (Search time: 0.002 seconds).
SCIE
FOREIGN
Characterization of Flexible Low-k Dielectric SiCOH Films Prepared by Plasma-Enhanced Chemical Vapor Deposition of Tetrakis(trimethylsilyloxy)Silane Precursor
Lee, Yeji; Ban, Wonjin; Jang, Seonhee;
Jung, Donggen
Article
Issue Date
2021
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.21, no.4, pp 2139 - 2147
Publisher
AMER SCIENTIFIC PUBLISHERS
1
Discover
Author
Ban, Wonjin
1
JUNG, DONG GEUN
1
Jang, Seonhee
1
Lee, Yeji
1
Subject
CONSTANT
1
Dielectric Constant
1
INFRARED-SPECTROSCOPY
1
Leakage Current
1
Low-k
1
PECVD
1
SiCOH
1
SILICON DIOXIDE FILMS
1
TEMPERATURE
1
TTMSS
1
.
next >
Date Issued
2021
1
Type
Article
1
Language
ENG
1
Journal
JOURNAL OF NANOSCIENCE AND NANOTE...
1
Journal Index
scie
1
BROWSE
한국어
Communities & Collections
Researchers
Articles
Journals
LIBRARY
