ScholarWorks@성균관대학교

초록

Enhancing the corrosion resistance of bipolar plates (BPPs) is crucial for improving the durability and efficiency of proton exchange membrane water electrolyzers (PEMWEs). This study investigates the impact of processing conditions on the microstructure, mechanical properties, and corrosion behavior of magnetron sputter deposited titanium (Ti) thin films on SiNx/Si and SUS316L substrates. Deposition temperature significantly affected the grain structure and phase transitions, with higher temperatures promoting the formation of a dense HCP phase with improved crystallinity. For Ti films deposited on SUS316L, the thermal expansion mismatch between the film and the substrate induces compressive residual stress in the Ti film, resulting in densification, reduced defect density, and enhanced resistance to plastic deformation and ion infiltration. Ti coatings deposited at elevated temperatures exhibited up to a 60 % increase in pitting potential compared to room-temperature deposited films, highlighting the role of stress-induced densification in mitigating crack formation. By establishing correlations between microstructure, mechanical properties, and corrosion resistance, this study provides insights into optimizing deposition processes and stress management strategies for durable coatings in PEMWEs. © 2025 Elsevier Ltd

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