ScholarWorks@성균관대학교

초록

This study presents a ceramic Digital Light Processing (DLP) 3D-printing strategy for fabricating electrostatic chucks (ESCs) with tunable dielectric properties and electrode designs. A custom-formulated photocurable resin was developed and optimized to achieve high cure depth and suitable rheological properties. Barium titanate (BaTiO3; BTO) was incorporated into the resin to enhance its dielectric permittivity while maintaining printability. The dielectric permittivity and breakdown voltage of the DLP-printed composite structures were systematically evaluated as functions of the BTO content. Finite Element Analysis (FEA) and experimental measurements confirmed that increasing BTO content improved relative permittivity but reduced dielectric strength. To balance these trade-offs, a dual-material strategy was adopted: the ESC body was printed with 5 vol% BTO to achieve high breakdown strength, while the dielectric layer was printed with a higher BTO content to increase chucking force. Simulations further revealed that electric fields were localized around interdigital electrode (IDE) edges, resulting in a limited polarization distribution. To address this issue, various IDE patterns with increased finger densities were implemented. These modifications significantly enhanced chucking force, as validated by both simulations and experiments. Overall, this study demonstrates that combining material formulation, ceramic DLP printing, and simulation-guided design enables rapid optimization of ESC performance, offering a flexible platform for advanced electrostatic device manufacturing.

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